US Patent Issued to Tokyo Electron on May 13 for "Controlling method and substrate transport module" (Japanese Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,525, issued on May 13, was assigned to Tokyo Electron Ltd. (Tokyo).

"Controlling method and substrate transport module" was invented by Hiroto Sato (Oshu, Japan), Takahiro Miki (Nirasaki, Japan) and Mitsuru Obara (Oshu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A controlling method according to an aspect of the present disclosure includes a first chamber provided with a fan, a second chamber to which a replacement gas is sent from the first chamber by the fan and which includes a transporter configured to transport a substrate, a circulation line configured to communicate the first chamber and the second chamber with each other and circul...