US Patent Issued to Tokyo Electron on March 4 for "Monitoring system for a sealing apparatus having a substrate treatment apparatus in a housing utilizing a laser sensor installed in a space between the housing and the substrate treatment apparatus and that scans a detection region therein" (Japanese Inventors)

ALEXANDRIA, Va., March 5 -- United States Patent no. 12,243,758, issued on March 4, was assigned to Tokyo Electron Ltd. (Tokyo).

"Monitoring system for a sealing apparatus having a substrate treatment apparatus in a housing utilizing a laser sensor installed in a space between the housing and the substrate treatment apparatus and that scans a detection region therein" was invented by Shota Kaneko (Koshi, Japan), Shigemi Oono (Koshi, Japan) and Norihide Sagara (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A monitoring system is for a sealing apparatus that seals a substrate treatment apparatus by a housing and fills a space sealed by the housing with a predetermined gas atmosphere. The monitori...