US Patent Issued to Tokyo Electron on March 25 for "Cleaning jig, coating apparatus, and cleaning method" (Japanese Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,257,611, issued on March 25, was assigned to Tokyo Electron Ltd. (Tokyo).

"Cleaning jig, coating apparatus, and cleaning method" was invented by Satoshi Shimmura (Kumamoto, Japan), Koji Takayanagi (Kumamoto, Japan), Kenta Shibasaki (Kumamoto, Japan) and Hiroichi Inada (Kumamoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cleaning jig of a disc shape used for cleaning an inside of a container while being held by a rotary holding device in a same manner as a substrate in a spin coating apparatus that supplies a processing liquid onto a substrate held by the rotary holding device disposed in the container and forms a film of the processing liq...