US Patent Issued to Tokyo Electron on March 25 for "Abnormality detection apparatus and abnormality detection method" (Japanese Inventor)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,260,548, issued on March 25, was assigned to Tokyo Electron Ltd. (Tokyo).

"Abnormality detection apparatus and abnormality detection method" was invented by Motoi Okada (Sapporo, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An abnormality detection apparatus is provided. The abnormality detection apparatus includes a first generation part configured to generate pseudo-abnormal image data by synthesizing a substantially circular image at a random position of an image of normal image data obtained by photographing equipment that includes a liquid supply and supplies a liquid from the liquid supply without an abnormality, a second generation part ...