ALEXANDRIA, Va., March 19 -- United States Patent no. 12,253,559, issued on March 18, was assigned to Tokyo Electron Ltd. (Tokyo).
"Alignment method and inspection apparatus" was invented by Shinjiro Watanabe (Yamanashi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An alignment method of a probe card includes a plurality of probe groups provided corresponding to a plurality of chips, comprising: a first mode for calculating a gradient and a center of a probe group based on position information of two or more probes included in the probe group for each of the plurality of chips and calculating a gradient and a center of the probe card based on the calculated gradients and the calculated centers of the...