ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,597, issued on June 3, was assigned to Tokyo Electron Ltd. (Tokyo).
"Pitch scaling in microfabrication" was invented by Katie Lutker-Lee (Albany, N.Y.) and Angelique Raley (Albany, N.Y.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of processing a substrate that includes: forming a first plurality of lines and a first plurality of recesses, each of the plurality of lines being separated from an adjacent one of the plurality of lines by one of the plurality of recesses, the first plurality of lines including a first material and formed over a to-be-patterned layer; performing a cyclic process including: depositing a mask material over the fi...