US Patent Issued to Tokyo Electron on June 3 for "Exhaust device, processing apparatus, and exhausting method" (Japanese Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,578, issued on June 3, was assigned to Tokyo Electron Ltd. (Tokyo).

"Exhaust device, processing apparatus, and exhausting method" was invented by Kazuya Nagaseki (Miyagi, Japan), Kazuki Moyama (Miyagi, Japan), Toshiya Matsuda (Tokyo), Naokazu Furuya (Miyagi, Japan) and Tatsuro Ohshita (Miyagi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An exhaust device including an exhaust mechanism and an exhaust unit is provided. The exhaust mechanism includes a first blade unit and a second blade unit provided in an exhaust space of a processing vessel including a processing space of a vacuum atmosphere for applying a process to a workpiece. The first b...