US Patent Issued to Tokyo Electron on June 17 for "Information processing apparatus and substrate processing method" (Japanese Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,332,630, issued on June 17, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information processing apparatus and substrate processing method" was invented by Hiroshi Ogino (Sapporo, Japan), Masanori Saito (Sapporo, Japan), Noriaki Kanaya (Sapporo, Japan) and Yasuhiro Tsuruma (Sapporo, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reception unit receives a processing instruction including a recipe. A calculation unit calculates an identifier from the recipe received by the receiving unit. A determination unit determines whether an identical identifier to the calculated identifier is stored in a memory. A control unit controls a substrate processin...