US Patent Issued to Tokyo Electron on July 8 for "Replacement buried power rail in backside power delivery" (New York Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,991, issued on July 8, was assigned to Tokyo Electron Ltd. (Tokyo).

"Replacement buried power rail in backside power delivery" was invented by Hoyoung Kang (Schenectady, N.Y.), Lars Liebmann (Mechanicville, N.Y.), Jeffrey Smith (Clifton Park, N.Y.), Anton Devilliers (Clifton Park, N.Y.) and Daniel Chanemougame (Niskayuna, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects of the disclosure provide a method for fabricating a semiconductor device. The method includes forming dummy power rails on a substrate by accessing from a first side of the substrate that is opposite to a second side of the substrate. Further, the method includes forming t...