US Patent Issued to Tokyo Electron on July 8 for "Heater temperature control method, heater, and placement stand" (Japanese Inventor)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,356,508, issued on July 8, was assigned to Tokyo Electron Ltd. (Tokyo).

"Heater temperature control method, heater, and placement stand" was invented by Shigeru Kasai (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a method for controlling the temperature of a heater which has a single plate-shaped member formed of a semiconductor substrate, and three or more electrodes formed on a side surface of the single plate-shaped member while being spaced apart from each other in a circumference direction, the method comprising a step for heating the plate-shaped member by supplying a power between the electrodes and sequentially cha...