ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,856, issued on July 8, was assigned to Tokyo Electron Ltd. (Tokyo).
"Film forming apparatus" was invented by Junichi Takei (Yamanashi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a film forming apparatus comprising a processing chamber including a processing chamber main body and a lid, a stage, a target, and a shield. The shield has a chamber shield fixed to the processing chamber main body and a target shield fixed to the lid. The chamber shield has a cylindrical sidewall and a horizontal wall formed at a radially outer side of the cylindrical sidewall. The target shield has a cylindrical portion extending toward the stag...