ALEXANDRIA, Va., July 30 -- United States Patent no. 12,374,564, issued on July 29, was assigned to Tokyo Electron Ltd. (Tokyo).
"Processing apparatus" was invented by Takayoshi Wakamatsu (Kumamoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus includes a chuck configured to hold a substrate; a moving unit to which a processing tool configured to process the substrate is mounted; a sprinkler configured to spray a cleaning liquid configured to clean the moving unit from an outside of the moving unit; and a housing accommodating the chuck, the processing tool, and the sprinkler therein. The sprinkler includes a fixed unit fixed to an inside of the housing, and a rotating unit rota...