US Patent Issued to Tokyo Electron on July 22 for "Substrate transfer device including housing provided with fan" (Japanese Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,368,069, issued on July 22, was assigned to Tokyo Electron Ltd. (Tokyo).

"Substrate transfer device including housing provided with fan" was invented by Kousei Ide (Kumamoto, Japan) and Naruaki Iida (Kumamoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate transfer device includes: a substrate holder configured to transfer a substrate to one of a plurality of processing modules that process the substrate; a base provided to be connected to the substrate holder; and a lift configured to move up and down the base. The lift includes: a plurality of rails and a plurality of seal belts arranged side by side in a left-right direction and ext...