US Patent Issued to Tokyo Electron on July 22 for "Information processing apparatus for teaching transfer position of substrate, transfer position teaching method, and substrate processing apparatus including the information processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,367,602, issued on July 22, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information processing apparatus for teaching transfer position of substrate, transfer position teaching method, and substrate processing apparatus including the information processing apparatus" was invented by Tadashi Enomoto (Iwate, Japan), Nao Akashi (Hokkaido, Japan) and Yutai Matsuhashi (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing apparatus of a substrate processing apparatus including a transport device includes an image data acquisition unit that acquires image data of a disposing position of a processing target substrate, a first ...