US Patent Issued to Tokyo Electron on July 15 for "Mounting table, inspection device, and temperature calibration method" (Singaporean, Japanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,359,982, issued on July 15, was assigned to Tokyo Electron Ltd. (Tokyo).

"Mounting table, inspection device, and temperature calibration method" was invented by Yoshihito Yamasaki (Singapore) and Jun Mochizuki (Nirasaki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a mounting table on which a substrate to be inspected is mounted. The mounting table comprises: a plurality of temperature sensors, each configured to measure a temperature of a corresponding one of a plurality of spots on the mounting table; and electrode pads, each connected to a corresponding one of the temperature sensors and installed on a mounting surface."

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