US Patent Issued to Tokyo Electron on July 15 for "Method for OES data collection and endpoint detection" (New York, California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,158, issued on July 15, was assigned to Tokyo Electron Ltd. (Tokyo).

"Method for OES data collection and endpoint detection" was invented by Sergey Voronin (Albany, N.Y.), Blaze Messer (Albany, N.Y.), Yan Chen (Fremont, Calif.), Joel Ng (Fremont, Calif.), Ashawaraya Shalini (Fremont, Calif.), Ying Zhu (Fremont, Calif.) and Da Song (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of processing a substrate that includes: exposing the substrate in a plasma processing chamber to a plasma powered by applying a first power to a first electrode of the plasma processing chamber for a first time duration; and after the first time dura...