ALEXANDRIA, Va., July 16 -- United States Patent no. 12,360,463, issued on July 15, was assigned to Tokyo Electron Ltd. (Tokyo).
"Fiber bundle based optical spot size selector" was invented by Ivan Maleev (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An optical apparatus is provided. The optical apparatus includes a plurality of optical fibers each configured to transmit a respective light beam. The plurality of optical fibers includes at least one first optical fiber and at least one second optical fiber. The optical apparatus also includes a first shutter module coupled to the first optical fiber and configured to adjust a first light beam in the first optical fiber in at least one aspect...