US Patent Issued to Tokyo Electron on July 15 for "Computer-readable recording medium, substrate bonding system, and substrate bonding method" (Japanese Inventor)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,212, issued on July 15, was assigned to Tokyo Electron Ltd. (Tokyo).

"Computer-readable recording medium, substrate bonding system, and substrate bonding method" was invented by Keiichi Saiki (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A computer-readable recording medium having stored thereon computer-executable instructions that, in response to execution on a computer, cause a processing to be performed is provided. The processing includes acquiring displacement data of multiple points on a surface of a substrate held by a chuck; specifying a distribution of displacements of the surface based on the acquired displacement data; and...