US Patent Issued to Tokyo Electron on Jan. 27 for "Warpage amount estimation apparatus and warpage amount estimation method" (Japanese Inventor)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,743, issued on Jan. 27, was assigned to Tokyo Electron Ltd. (Tokyo).

"Warpage amount estimation apparatus and warpage amount estimation method" was invented by Akiko Kiyotomi (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A warpage amount estimation apparatus that estimates a warpage amount of a substrate includes a processor and a memory. The processor acquires a captured image of one surface of an estimation target substrate. The processor calculates a rate of change in pixel value relating to a substrate radial direction in the captured image of the one surface of the estimation target substrate. The processor estimates a warpage am...