US Patent Issued to Tokyo Electron on Jan. 27 for "Teaching method and transfer system for substrate using three-dimensional image data" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,536,776, issued on Jan. 27, was assigned to Tokyo Electron Ltd. (Tokyo).

"Teaching method and transfer system for substrate using three-dimensional image data" was invented by Masakazu Yamamoto (Iwate, Japan), Tadashi Enomoto (Iwate, Japan), Yuta Kunitake (Iwate, Japan) and Yutai Matsuhashi (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a teaching method for a transfer device configured to transfer a substrate between a transfer source object and a transfer destination object on which the substrate is disposable. The teaching method includes: generating three-dimensional image data of a shape of the transfer source ob...