ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,529,139, issued on Jan. 20, was assigned to Tokyo Electron Ltd. (Tokyo).
"Shower plate and film deposition apparatus" was invented by Yuji Obata (Yamanashi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A shower plate that includes a plate-like member provided at a top of a processing chamber is provided. The shower plate has first holes communicating with a first flow path in the shower plate. The shower plate includes first chamber valves provided with the respective first holes. The shower plate has second holes communicating with a second flow path in the shower plate. The shower plate includes second chamber valves provided with the respecti...