US Patent Issued to Tokyo Electron on Jan. 20 for "Broom camera and rotational stage for metrology measurements" (California, Arizona Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,529,655, issued on Jan. 20, was assigned to Tokyo Electron Ltd. (Tokyo).

"Broom camera and rotational stage for metrology measurements" was invented by Ivan Maleev (Fremont, Calif.) and Andrej Mitrovic (Chandler, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of measuring thin-film thickness, overlay, and wafer-to-wafer bonding overlay, including providing a substrate on a handling stage configured for rotation; illuminating the substrate with a broadband illumination beam; obtaining a first set of reflectivity spectra of a first linear region of the substrate via a hyperspectral broom camera; incrementally rotating the substrate by an an...