ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,453, issued on Jan. 13, was assigned to Tokyo Electron Ltd. (Tokyo).
"Processing apparatus and processing method" was invented by Hayato Tanoue (Kumamoto, Japan), Yohei Yamashita (Kumamoto, Japan) and Hirotoshi Mori (Kumamoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus configured to process a processing target object includes a modifying device configured to radiate laser light to an inside of the processing target object to form multiple modification layers along a plane direction; and a controller configured to control an operation of the modifying device at least. The controller controls the modifying device to fo...