US Patent Issued to Tokyo Electron on Jan. 13 for "Optical sensor for remote temperature measurements" (California Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,473, issued on Jan. 13, was assigned to Tokyo Electron Ltd. (Tokyo).

"Optical sensor for remote temperature measurements" was invented by Ivan Maleev (Fremont, Calif.), Yan Sun (San Jose, Calif.) and Zheng Yan (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects of the present disclosure provide a sensor for remote temperature measurement. For example, the sensor can include a light source configured to form an illumination beam, focusing optics configured to direct the illumination beam from the light source onto a semiconductor sample at an illuminated spot thereof, for exciting bandgap photoluminescence (PL) light in the semico...