US Patent Issued to Tokyo Electron on Jan. 13 for "Motor control method, transfer device, and storing medium" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,906, issued on Jan. 13, was assigned to Tokyo Electron Ltd. (Tokyo).

"Motor control method, transfer device, and storing medium" was invented by Youichi Masaki (Koshi, Japan), Mitsuteru Yano (Koshi, Japan), Eiichi Sekimoto (Koshi, Japan), Tsuyoshi Otsuka (Koshi, Japan), Akihiro Teramoto (Koshi, Japan), Teppei Ito (Koshi, Japan) and Koji Takayanagi (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive da...