ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,523,618, issued on Jan. 13, was assigned to Tokyo Electron Ltd. (Tokyo).
"Inspection system" was invented by Tomoya Endo (Yamanashi, Japan), Kentaro Konishi (Yamanashi, Japan), Yuki Ishida (Yamanashi, Japan) and Jun Fujihara (Yamanashi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is an inspection system including multiple inspection units configured to inspect substrates, wherein each of the inspection units includes: a tester configured to inspect a substrate; a moving part configured to hold and move the substrate relative to the tester; and a frame structure configured to accommodate the tester and the moving part, wherein the frame st...