ALEXANDRIA, Va., Feb. 5 -- United States Patent no. 12,216,406, issued on Feb. 4, was assigned to Tokyo Electron Ltd. (Tokyo).
"Coating method and coating apparatus" was invented by Yusaku Hashimoto (Kumamoto, Japan), Masatoshi Kawakita (Kumamoto, Japan) and Kosuke Yoshihara (Kumamoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A coating method of supplying a treatment solution to a substrate and coating the substrate with the treatment solution by a spin coating method. The method includes mixing a solvent for the treatment solution lower in surface tension than the treatment solution into the treatment solution concurrently with a start of supply of the treatment solution or later than the start ...