ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,390, issued on Feb. 3, was assigned to Tokyo Electron Ltd. (Tokyo).
"Raw material supply system" was invented by Eiichi Komori (Nirasaki, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A raw material supply system includes: a first storage part configured to store a solution obtained by dissolving a first solid raw material in a solvent or a dispersion obtained by dispersing the first solid raw material in the solvent; a second storage part configured to store the solution or the dispersion transported from the first storage part; a detection part configured to detect an amount of the solution or the dispersion stored in the first storage part;...