ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,541,155, issued on Feb. 3, was assigned to Tokyo Electron Ltd. (Tokyo).
"Coaxial see-through inspection system" was invented by Anton J. Devilliers (Clifton Park, N.Y.), Anthony R. Schepis (Averill Park, N.Y.) and David Conklin (Saratoga Springs, N.Y.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects of the present disclosure provide an inspection system, which can include an image module and processing circuitry. The imaging module can image a wafer with a first light beam and a second light beam. The first light beam can be coaxially aligned with the second light beam, and image a first pattern located on a front side of a wafer to form a first im...