US Patent Issued to Tokyo Electron on Feb. 18 for "Bath systems and methods thereof" (American, Japanese Inventors)

ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,226,796, issued on Feb. 18, was assigned to Tokyo Electron Ltd. (Tokyo).

"Bath systems and methods thereof" was invented by Michael Carcasi (Austin, Texas), Ihsan Simms (Austin, Texas), Joel Estrella (Austin, Texas), Antonio Luis Pacheco Rotondaro (Austin, Texas), Joshua Hooge (Austin, Texas) and Hiroshi Marumoto (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by ...