US Patent Issued to Tokyo Electron on Dec. 30 for "Test device and temperature control method with temperature sensors" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,510,585, issued on Dec. 30, was assigned to Tokyo Electron Ltd. (Tokyo).

"Test device and temperature control method with temperature sensors" was invented by Hiroyuki Nakayama (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A test device according to one aspect of the present disclosure includes a stage configured to mount a substrate, a first temperature sensor configured to measure a surface temperature of the stage and a temperature of the substrate mounted on the stage, a second temperature sensor for controlling a temperature of the stage, and a controller configured to control the temperature of the stage by offsetting a control ...