US Patent Issued to Tokyo Electron on Dec. 2 for "Semiconductor manufacturing apparatus including temperature sensor inside gas pipe and temperature control method thereof" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,129, issued on Dec. 2, was assigned to Tokyo Electron Ltd. (Tokyo).

"Semiconductor manufacturing apparatus including temperature sensor inside gas pipe and temperature control method thereof" was invented by Tadashi Enomoto (Iwate, Japan) and Tsutomu Sugawara (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor manufacturing apparatus includes: a gas introduction pipe connected to a processing container of the semiconductor manufacturing apparatus in order to introduce a gas into the processing container; and a temperature sensor provided in the gas introduction pipe in order to measure a temperature of a gas in the gas introd...