US Patent Issued to Tokyo Electron on Dec. 16 for "Connected processing container and substrate processing method" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,100, issued on Dec. 16, was assigned to Tokyo Electron Ltd. (Tokyo).

"Connected processing container and substrate processing method" was invented by Takayuki Yamagishi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a connected processing container comprising: a first processing container and a second processing container arranged side by side in a horizontal direction with a gap therebetween and respectively accommodating a substrate for vacuum processing; a first block portion fixed to the first processing container; a second block portion fixed to the second processing container and arranged side by side in the horizontal...