US Patent Issued to Tokyo Electron on Aug. 5 for "Peripheral edge processing apparatus, peripheral edge processing method, and computer-readable recording medium" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,379,200, issued on Aug. 5, was assigned to Tokyo Electron Ltd. (Tokyo).

"Peripheral edge processing apparatus, peripheral edge processing method, and computer-readable recording medium" was invented by Masashi Enomoto (Kumamoto, Japan), Hideaki Kashiwagi (Kumamoto, Japan) and Naoto Nakamura (Kumamoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes: an capturing part that captures a peripheral edge portion of a substrate including a reference substrate and a workpiece substrate, so as to acquire captured images of the reference and workpiece substrates; a first calculation part that calculates a theoretical peripheral edge posi...