ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,397,375, issued on Aug. 26, was assigned to Tokyo Electron Ltd. (Tokyo).
"Processing apparatus and processing method" was invented by Hirotoshi Mori (Kumamoto, Japan), Yohei Yamashita (Kumamoto, Japan) and Hayato Tanoue (Kumamoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus configured to process a processing target object includes a holder configured to hold the processing target object; a modifying device configured to radiate laser light to an inside of the processing target object to form multiple internal modification layers; and a controller. The controller controls an operation of forming the internal modification l...