ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,844, issued on Aug. 26, was assigned to Tokyo Electron Ltd. (Tokyo).
"Plasma processing apparatus and method of measuring temperature of members" was invented by Koji Kawamura (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma processing apparatus having a processing container and an electrode includes: a preprocessing part configured to perform a preprocessing of igniting plasma to increase a temperature of members within the processing container; a power application part configured to apply a radio frequency (RF) power to the electrode without igniting plasma after the preprocessing is performed; a measuring part configured to ...