ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,398,324, issued on Aug. 26, was assigned to Tokyo Electron Ltd. (Tokyo).
"Methods for controlling the pitch of self-assembled ionic liquid crystal (ILC) structures" was invented by Dipak Aryal (Austin, Texas), Kate Abel (Austin, Texas), Takeo Nakano (Nirasaki, Japan) and Tamotsu Morimoto (Nirasaki, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of improved methods are provided to form ordered structures on a surface of a substrate using direct self-assembly (DSA) of ionic liquid crystals (ILCs). More specifically, various embodiments of methods are provided to control the pitch of a layered structure formed on a substrate surface via s...