US Patent Issued to Tokyo Electron on Aug. 26 for "Information processing apparatus, information processing system, and part ordering method" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,191, issued on Aug. 26, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information processing apparatus, information processing system, and part ordering method" was invented by Masakazu Yamamoto (Iwate, Japan) and Tadashi Enomoto (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing apparatus executes a simulation of a state of a process which is being performed in a semiconductor manufacturing apparatus, by using a simulation model of the semiconductor manufacturing apparatus. The information processing apparatus includes: a physical sensor data acquisition unit that acquires physical sensor data measured in the sem...