ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,888, issued on Aug. 26, was assigned to Tokyo Electron Ltd. (Tokyo).
"Data fusion of multiple sensors" was invented by Masaki Kitsunezuka (Sapporo, Japan), Chungjong Lee (Tokyo) and Jun Shinagawa (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a method for monitoring a plasma-related process in a plasma tool. The method includes measuring data associated with the plasma-related process using a plurality of sensors while executing the plasma-related process on a wafer. Respective data measured by each sensor of the plurality of sensors are input into a respective individual estimation method to output a respective individu...