ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,607, issued on Aug. 19, was assigned to Tokyo Electron Ltd. (Tokyo).
"Attracting method" was invented by Shoichiro Matsuyama (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of attracting an object to a mounting table is provided. The object is a substrate, an edge ring, or a combination of the substrate and the edge ring. The mounting table is provided with an electrostatic chuck including electrodes. After the object is placed on the electrostatic chuck, n-phase alternating current (AC) voltages (nless than=2) are applied to the electrodes. Each phase voltage of the n-phase AC voltages has a phase different from each other, a...