ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,914, issued on Aug. 12, was assigned to Tokyo Electron Ltd. (Tokyo).
"Upper electrode assembly" was invented by Lifu Li (Miyagi, Japan), Takaki Kobune (Miyagi, Japan) and Hiroshi Tsujimoto (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An upper electrode assembly used in a plasma processing apparatus is provided. The upper electrode assembly comprises: an electrode plate; a metal plate; and a heat transfer sheet disposed between the electrode plate and the metal plate and having a vertically oriented portion. The vertically oriented portion has a plurality of vertically oriented graphene structures oriented along a vertical direction....