ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,713, issued on April 29, was assigned to Tokyo Electron Ltd. (Tokyo).
"Mounting table and plasma processing apparatus" was invented by Yasuharu Sasaki (Miyagi, Japan), Daiki Satoh (Miyagi, Japan) and Akira Nagayama (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A mounting table, to which a voltage is applied, includes an electrostatic chuck having a mounting surface for mounting a target object and a rear surface opposite to the mounting surface, the electrostatic chuck having a first through-hole formed in the mounting surface; a base, which is in contact with the rear surface of the electrostatic chuck, having a second through-hole c...