ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,033, issued on April 15, was assigned to Tokyo Electron Ltd. (Tokyo).
"Methods for wet etching of noble metals" was invented by Paul Abel (Austin, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides improved wet etch processes and methods for etching noble metals. More specifically, the present disclosure provides various embodiments of wet etch processes and methods that utilize new etch chemistries for etching noble metals, such as ruthenium (Ru), gold (Au), platinum (Pt) and iridium (Ir), in a wet etch process. In general, the disclosed embodiments expose a noble metal surface to a first etch solution to chemically...