ALEXANDRIA, Va., June 12 -- United States Patent no. 12,298,494, issued on May 13, was assigned to TOHOKU UNIVERSITY (Miyagi, Japan).
"Scanning mirror and manufacturing method for scanning mirror" was invented by Kazuhiro Hane (Sendai, Japan), Takashi Sasaki (Sendai, Japan) and Yuki Fujita (Sendai, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A scanning mirror that prevents the oxidation or hydroxylation of a torsion bar, thereby suppressing deterioration of the torsion bar and a manufacturing method for the scanning mirror. The scanning mirror has a torsion bar provided so as to support a mirror portion and of which the surface is covered with an atomic layer deposition (ALD) layer. The scanning mir...