ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,418, issued on Sept. 23, was assigned to TMEIC Corp. (Tokyo).
"Active gas generation apparatus" was invented by Ren Arita (Tokyo) and Kensuke Watanabe (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An object of the present disclosure is to obtain an active gas generation apparatus capable of supplying a highly concentrated active gas from a gas ejection port to a processing space at a subsequent stage. Then, in the active gas generation apparatus (51) of the present disclosure, in a main dielectric space being a space in which an electrode dielectric film (30) and an electrode dielectric film (40) face each other, a region where electrode co...