ALEXANDRIA, Va., June 12 -- United States Patent no. 12,298,492, issued on May 13, was assigned to THE TEXAS A&M UNIVERSITY SYSTEM (College Station, Texas).
"Batch fabrication of MEMS scanning mirror" was invented by Jun Zou (College Station, Texas) and Song Xu (College Station, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods are disclosed for manufacturing a Micro-ElectroMechanical Systems (MEMS) scanning mirror. In an embodiment, one method includes depositing a hinge material on a substrate and removing first and second portions of the substrate to form an outer frame, an inner frame, and a mirror plate in the substrate. First and second portions of the hinge material rotationally couple the ...