ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,337, issued on Sept. 9, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).
"System and method for MEMS devices" was invented by Toby Linder (Dallas), John Hamlin (Dallas) and Kelly J. Taylor (Allen, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate, and a MEMS structure supported by the substrate. The MEMS structure includes a first layer of a first material comprising a titanium aluminum alloy. The MEMS structure further includes an aluminum layer on the first layer."
The patent was filed on Feb. 25, 2022, under Application No. ...