US Patent Issued to TEXAS INSTRUMENTS on Nov. 4 for "Selective etches for reducing cone formation in shallow trench isolations" (Texas Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,088, issued on Nov. 4, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).

"Selective etches for reducing cone formation in shallow trench isolations" was invented by Karen Hildegard Ralston Kirmse (Richardson, Texas) and Jonathan Philip Davis (Allen, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Techniques of fabricating shallow trench isolation structures that reduce or minimize the number of trench cones during the formation of shallow trenches. The disclosed techniques introduce separate etch steps for etching shallow trenches with small feature dimensions and for etching shallow trenches with large feature dimensions. As an example, the disc...