US Patent Issued to TEXAS INSTRUMENTS on March 18 for "Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers" (Texas Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,252,396, issued on March 18, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).

"Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers" was invented by Christopher Murray Beard (Allen, Texas), Song Zheng (Fairview, Texas), John Wesley Hamlin III (Dallas), Win-Jae Jessie Yuan (Dallas), Kelly Jay Taylor (Allen, Texas) and Jose Antonio Martinez Soto (Murphy, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositin...