US Patent Issued to TEXAS INSTRUMENTS on Jan. 13 for "MEMS resonator with temperature compensation" (Indiana, Texas Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,945, issued on Jan. 13, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).

"MEMS resonator with temperature compensation" was invented by Udit Rawat (West Lafayette, Ind.) and Bichoy Bahr (Alle, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical systems (MEMS) resonator includes a substrate, an array of ferroelectric capacitors on the substrate, and a three-dimensional metal stack above the array of ferroelectric capacitors. The three-dimensional metal stack may include more than two metal layers. Each of the metal layers is coupled to another of the metal layers by more than two metal vias."

The patent was filed on June 30...